Material Type:Stainless Steel
Electrostatic Force Adjustment Range:± 500 mN
Vacuum Compatibility:Up to 10 Torr
Temperature Range:-40°C to +250°C
Diameter:8 inches
Height:1 inch
Electrode Configuration:Dual Electrode Design
Engineered for optimal performance in high-volume semiconductor fabrication lines, our LAM ELECTROSTATIC CHUCK 839-800327-315 ensures unparalleled precision in wafer handling.
Crafted from high-grade stainless steel, this chuck provides exceptional durability and resistance to corrosion, ensuring longevity in demanding industrial environments.
Equipped with adjustable electrostatic force capabilities, it allows for fine-tuning to accommodate various wafer sizes and materials, enhancing process efficiency and yield.
Featuring an expansive temperature range, it maintains stable thermal conditions throughout the manufacturing process, reducing variability and improving product quality.
Vacuum compatibility up to 10^-4 Torr enables precise control over atmospheric conditions, minimizing contamination and ensuring consistent results across batches.
Designed with ease of integration in mind, our LAM ELECTROSTATIC CHUCK is compatible with a wide array of semiconductor equipment, facilitating seamless implementation into existing production lines.
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